Graphoepitaxial Assembly of Block Copolymer for Bending Stripe Patterns
Journal
MACROMOLECULAR THEORY AND SIMULATIONS
Date
2019.04.18
Abstract
The formation of bend patterns using block copolymer lamellae within trench-type groove
patterned with bend geometry is simulated by using a Monte Carlo simulation and a
strong segregation theory. A tolerance of curvatures at the bend corners of the guide
pattern for the formation of bent lamellae is proposed. It is found from the simulation and
the strong segregation theory that the tolerance of curvature radii of two bend corners for
the well-patterned lamellar bends is proportional to the inverse of the trench width in the
straight region.