headerSearch form

Changing the World through Creative Research

Engineering silk protein to modulate polymorphic transitions for green lithography resists

Journal
ACS Applied Materials & Interfaces
Date
2022.12.16
Abstract

Silk protein is being increasingly introduced as a prospective material for biomedical devices. However, a limited locus to intervene in nature-oriented silk protein makes it challenging to implement on-demand functions to silk. Here, we report how polymorphic transitions are related with molecular structures of artificially synthesized silk protein and design principles to construct a green-lithographic and high-performative protein resist. The repetition number and ratio of two major building blocks in synthesized silk protein are essential to determine the size and content of β-sheet crystallites, and radicals resulting from tyrosine cleavages by the 193-nm laser irradiation induce the β-sheet to α-helix transition. Synthesized silk is designed to be exclusively comprised of homogeneous building blocks and exhibit high crystallization and tyrosine-richness, thus constituting an excellent basis for developing a high-performance deep-UV photoresist. Additionally, our findings can be conjugated to design an electron-beam resist governed by the different irradiation-protein interaction mechanism. All synthesis and lithography processes are fully water-based, promising green lithography. Using the engineered silk, a nanopatterned planar color filter showing the reduced angle dependence can be obtained. Our study provides insights toward the industrial scale production of silk protein with on-demand functions.

Reference
ACS Appl. Mater. Interfaces 2022, 14, 56623?56634
DOI
https://doi.org/10.1021/acsami.2c17843