100％ Polycrystalline, Large-Grained Silicon Arrays Formed at Room-Temperature Ambient by Local Pyrolysis
Journal
Crystal Growth & Design
Date
2012.05.25
Abstract
We report room-temperature ambient synthesis of high-quality, several ㎛ -thick
polycrystalline silicon arrays on sodalime glass substrates by local pyrolysis, where SiH4
gas is locally decomposed near and condensed on the resistively heated microheater arrays
with a growth rate of 50 nm/s. The silicon arrays had 100％ crystallinity and a minimum
grain size larger than 0.2 ㎛, as determined by spatially-resolved Raman spectroscopy and
transmission electron microscopy. Boron-doped silicon arrays by the local pyrolysis was
further fabricated to yield concentric p-i-n hetero-junction arrays with rectifying currentvoltage
or photovoltaic characteristics.