Characterization and analysis of harmonic emissions in nonlinear bulk acoustic wave resonators

Abstract: Harmonic emissions of nonlinear bulk acoustic wave (BAW) resonator with their different configurations are demonstrated and analyzed. With the anti-polarization configuration of the piezoelectric resonators, the second harmonic emissions are dramatically reduced. However, the anti-series configuration of dual BAW resonators exhibits sharp increase in second harmonic emissions near anti-resonance frequency. By investigating the phase difference of the generated harmonic waves, we show the reason of that sharp increase