Samsung Advanced Institute of Technology

In the quest to optimize graphene structures for integration into advanced electronic applications, understanding the dynamics of growth conditions is crucial. This research, conducted under a low-temperature process within a plasma atmosphere, highlights the significant role of hydrogen in modulating the growth modes of nanocrystalline graphene (nc-G) on representative metals: Cu, Ru, and Co. We discovered that hydrogen alters the surface-mediated growth mode from vertical to lateral on metals like Cu, and its suppression of carbon adsorption on metal surfaces results in a noticeable reduction in the surface-mediated growth rate ofnc-G. Importantly, the effects of hydrogen varied across metals due to their different carbon solubilities and hydrogen adsorption energies. On the other hand, for metals such as Co that favor bulk-mediated growth, the influence of hydrogen becomes secondary as the carbon supply is predominantly determined by the metal thickness and its carbon solubility. Through these insights, this study offers a comprehensive framework for adjusting growth conditions, setting the groundwork for the utilization ofnc-G in future electronic systems.